|
|
| Sizes |
|
From
5 to 400 mm |
|
Radius
of Curvature |
|
From
flat to 300 mm |
| Roughness |
|
Down
to 0.05 nm (0.5*) rms depending on material |
| Wavelengths |
|
193
nm to 5 microns |
| Flatness |
|
to
l/40 |
| Materials |
|
Typical
optical materials including fused silica, BK7, silicon, sapphire,
low expansion glasses, silicon carbide |
|
|
